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Manufacturing an accelerometer that uses piezoresistance first starts with a semiconductor layer that is attached to a handle wafer by a thick oxide layer. The semiconductor layer is then patterned to the accelerometer's geometry. This semiconductor layer has one or more apertures so that the underlying mass will have the corresponding apertures.
Piezoelectric sensors which do not possess IEPE electronics, meaning with charge output, remain reserved for applications where lowest frequencies, high operating temperatures, an extremely large dynamic range, very energy saving operation or extremely small design is required.
For accelerometers, a seismic mass is attached to the crystal elements. When the accelerometer experiences a motion, the invariant seismic mass loads the elements according to Newton's second law of motion =. The main difference in working principle between these two cases is the way they apply forces to the sensing elements.
The charge signals at the input of a charge amplifier can be as low as some fC (FemtoCoulomb = 10 −15 C). A parasitic effect of common coaxial sensor cables is a charge shift when the cable is bent. Even slight cable motion may produce considerable charge signals which cannot be distinguished from the sensor signal.
Car's door attached to an electromagnetic shaker. A photograph showing the test set-up of a MIMO test on a wind turbine rotor. The blades are excited using three mechanical shakers and the response is measured using 12 accelerometers mounted to Blade 3; in the next stage of the test, the accelerometers can be moved to Blade 2 and 3 to measure response at those locations.
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An accelerometer measures proper acceleration, which is the acceleration it experiences relative to freefall and is the acceleration felt by people and objects. [2] Put another way, at any point in spacetime the equivalence principle guarantees the existence of a local inertial frame, and an accelerometer measures the acceleration relative to that frame. [4]
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