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Nanomanufacturing is a relatively recent branch of manufacturing that represents both a new field of science and also a new marketplace. Research in nanomanufacturing, unlike tradition manufacturing, requires collective effort across typical engineering divides, such as collaboration between mechanical engineers , physicists, biologists ...
Nanotechnology is the manipulation of matter with at least one dimension sized from 1 to 100 nanometers (nm). At this scale, commonly known as the nanoscale, surface area and quantum mechanical effects become important in describing properties of matter.
The NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (CHN) is one of four nanoscale engineering research centers funded by the NSF. Since 2004, the CHN has carried out over $50 million in research funded by NSF, government agencies, foundations and the private sector.
Two complementary approaches to fabrication of NEMS can be found, the top-down approach and the bottom-up approach. The top-down approach uses the traditional microfabrication methods, i.e. optical, electron-beam lithography and thermal treatments, to manufacture devices. While being limited by the resolution of these methods, it allows a large ...
Trenches as small as 9 nm have been achieved with this approach, using 15 keV Ar+ ion implantation at 15-degree angles into a 10 nm thermal SiO 2 masking layer. A fundamental aspect of this approach is the correlation between damage width and damage pitch; both widen at the same time for fixed ion mask height and ion beam angle.
There are currently many different approaches to building productive nanosystems: including top-down approaches like Patterned atomic layer epitaxy [7] and Diamondoid Mechanosynthesis. [8] There are also bottom-up approaches like DNA Origami and Bis-peptide Synthesis. [9] A fifth step, info/bio/nano convergence, was added later by Roco.
Normal approaches, such as critical dimension-scanning electron microscopy (CD-SEM), to obtain data for pattern quality inspection take too much time and is also labor-intensive. On the other hand, the optical scatterometer-based metrology is a non-invasive technique and has very high throughput due to its larger spot size.
Nanomanufacturing Nanomaterials Can be subdivided into nanoparticles, nanofilms and nanocomposites. Nanomedicine Nano-Optics Interaction of light and matter on the nanoscale. Nanopens & Nanopencils Allows for drawing electronic circuits a thousand times smaller than current ones. NanoPGM Nanopharmaceuticals
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