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Laurell Technologies WS-400 spin coater used to apply photoresist to the surface of a silicon wafer. Spin coating is a procedure used to deposit uniform thin films onto flat substrates. Usually a small amount of coating material in liquid form is applied on the center of the substrate, which is either spinning at low speed or not spinning at all.
A fluid reservoir to store the main supply of coating fluid for the system; A pump to drive the coating fluid through the system; A slot-die to distribute the coating fluid across the desired coating width before coating onto the substrate; A substrate mounting system to support the substrate in a controlled manner as it moves through the system
A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
Electron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase.
A typical co-axial electrospinning setup. Two concentrically parallel needles form the co-axial spinneret. A composite Taylor cone formulates at the orifice of the needle encompassing the two solutions, fed to the needle from two independent reservoirs (syringe pumps). In this example, a negatively charged mandrel is used as a collector.
They are important tools for improving the performance of many vacuum systems. Sintered onto the inner surface of high vacuum vessels, the NEG coating can be applied even to spaces that are narrow and hard to pump out, which makes it very popular in particle accelerators where this is an issue. The main sorption parameters of the kind of NEGs ...
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