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Laurell Technologies WS-400 spin coater used to apply photoresist to the surface of a silicon wafer. Spin coating is a procedure used to deposit uniform thin films onto flat substrates. Usually a small amount of coating material in liquid form is applied on the center of the substrate, which is either spinning at low speed or not spinning at all.
A schematic of a typical slot-die coating system. Slot-die coating equipment is available in a variety of configurations and form factors. However, the vast majority of slot-die processes are driven by a similar set of common core components. These include: A fluid reservoir to store the main supply of coating fluid for the system; A pump to ...
Once the glass substrate is cleaned using detergents and ultrasonic baths, the glass is placed in a spin coater. The spin coater rinses the glass blank with a solvent and then applies either photoresist or dye-polymer depending on the mastering process. Rotation spreads photoresist or dye-polymer coating evenly across the surface of the glass ...
The system is an axial compressor that puts energy into the gas, rather than a turbine, which takes energy out of a moving fluid to create rotary power, thus "turbomolecular pump" is a misnomer. Gas captured by the upper stages is pushed into the lower stages and successively compressed to the level of the fore-vacuum (backing pump) pressure.
Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a ...
Electron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase.
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