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Scanning probe lithography[1] (SPL) describes a set of nanolithographic methods to pattern material on the nanoscale using scanning probes. It is a direct-write, mask-less approach which bypasses the diffraction limit and can reach resolutions below 10 nm. [2] It is considered an alternative lithographic technology often used in academic and ...
Dip pen nanolithography (DPN) is a scanning probe lithography technique where an atomic force microscope (AFM) tip is used to directly create patterns on a substrate. [1] It can be done on a range of substances with a variety of inks. A common example of this technique is exemplified by the use of alkane thiolates to imprint onto a gold surface ...
Technology portal. v. t. e. Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level. The first successful scanning tunneling ...
Thermal polymer decomposition. Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography [1] (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy. Related fields are thermo-mechanical SPL (see also Millipede memory), thermochemical SPL[2][3] (or ...
A probe tip is an instrument used in scanning probe microscopes (SPMs) to scan the surface of a sample and make nano-scale images of surfaces and structures. The probe tip is mounted on the end of a cantilever and can be as sharp as a single atom. In microscopy, probe tip geometry (length, width, shape, aspect ratio, and tip apex radius) and ...
Optical Lithography (or photolithography) is one of the most important and prevalent sets of techniques in the nanolithography field. Optical lithography contains several important derivative techniques, all that use very short light wavelengths in order to change the solubility of certain molecules, causing them to wash away in solution, leaving behind a desired structure.
Thermochemical nanolithography ( TCNL) or thermochemical scanning probe lithography ( tc-SPL) is a scanning probe microscopy -based nanolithography technique which triggers thermally activated chemical reactions to change the chemical functionality or the phase of surfaces. Chemical changes can be written very quickly through rapid probe ...
On the left hand side piezoresponse phase can be seen where the measured phase changes to show the out-of-plane components that are pointing out of the screen, white areas, and into the screen, dark areas. The scan area is 20×10 μm 2. Below each scan is the relevant cross-section that shows in arbitrary units the PR amplitude and phase.
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