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  2. Trichlorosilane - Wikipedia

    en.wikipedia.org/wiki/Trichlorosilane

    Melting point: −126.6 °C (−195.9 °F; 146.6 K) ... Trichlorosilane (TCS) is an inorganic compound with the formula HCl 3 Si. It is a colourless, volatile liquid.

  3. Chlorosilane - Wikipedia

    en.wikipedia.org/wiki/Chlorosilane

    Silicon tetrachloride and trichlorosilane are intermediates in the production of ultrapure silicon in the semiconductor industry. Chlorosilanes obtained from crude silicon are purified by fractional distillation techniques and then reduced with hydrogen to give silicon of 99.999 999 999 % purity.

  4. Dichlorosilane - Wikipedia

    en.wikipedia.org/wiki/Dichlorosilane

    Melting point: −122 °C (−188 °F; 151 K) ... a reaction intended to give trichlorosilane. ... which will readily hydrolyze and self ignite in air.

  5. Silane - Wikipedia

    en.wikipedia.org/wiki/Silane

    Melting point: −185 °C (−301.0 °F; ... The trichlorosilane is then converted to a mixture of silane and ... which burns on contact with air and produces tiny ...

  6. Hydrogen chloride - Wikipedia

    en.wikipedia.org/wiki/Hydrogen_chloride

    Melting point: −114.22 °C (−173.60 °F; 158.93 K) ... Trichlorosilane, ... Initially, this gas was vented to air, ...

  7. Methyltrichlorosilane - Wikipedia

    en.wikipedia.org/wiki/Methyltrichlorosilane

    Melting point: −77 °C (−107 °F; 196 K) Boiling point: ... Methyltrichlorosilane is an alternative to HCl gas or to trichlorosilane. References

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  9. Silicon tetrachloride - Wikipedia

    en.wikipedia.org/wiki/Silicon_tetrachloride

    Like other chlorosilanes or silanes, silicon tetrachloride reacts readily with water: . SiCl 4 + 2 H 2 O → SiO 2 + 4 HCl. The reaction can be noticed on exposure of the liquid to air, as SiCl 4 vapour produces fumes as it reacts with moisture to give a cloud-like aerosol of silica and hydrochloric acid. [6]