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Piranha solution
RCA clean - Wikipedia ... RCA clean
Etching (microfabrication) Etching tanks used to perform Piranha, hydrofluoric acid or RCA clean on 4-inch wafer batches at LAAS technological facility in Toulouse, France. Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module in ...
Semiconductor device fabrication
This page was last edited on 6 August 2007, at 19:43 (UTC).; Text is available under the Creative Commons Attribution-ShareAlike License 4.0; additional terms may ...
Plasma cleaning. Fig. 1. The surface of a MEMS device is cleaned with bright, blue oxygen plasma in a plasma etcher to rid it of carbon contaminants. (100mTorr, 50W RF) Plasma cleaning is the removal of impurities and contaminants from surfaces through the use of an energetic plasma or dielectric barrier discharge (DBD) plasma created from ...
Buffered oxide etch
Sonication and scrubbing with a pipe cleaner may be helpful in removing traces of solid contaminants. If necessary, the tube may be filled with an oxidizing solution of aqua regia or piranha solution (H 2 O 2 /H 2 SO 4). Care should be taken with these solutions, as they can unexpectedly and violently erupt from the NMR tube due to pressure ...
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