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  2. Radio-frequency microelectromechanical system - Wikipedia

    en.wikipedia.org/wiki/Radio-frequency_micro...

    The usage of true-time-delay TTD phase shifters instead of RF MEMS phase shifters allows UWB radar waveforms with associated high range resolution, and avoids beam squinting or frequency scanning. TTD phase shifters are designed using the switched-line principle [8] [31] [32] or the distributed loaded-line principle.

  3. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.

  4. Microphone - Wikipedia

    en.wikipedia.org/wiki/Microphone

    MEMS microphone Akustica AKU230. The MEMS (microelectromechanical systems) microphone is also called a microphone chip or silicon microphone. A pressure-sensitive diaphragm is etched directly into a silicon wafer by MEMS processing techniques and is usually accompanied with an integrated preamplifier. [35] Most MEMS microphones are variants of ...

  5. Microoptoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Microoptoelectromechanical...

    In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...

  6. Microelectromechanical system oscillator - Wikipedia

    en.wikipedia.org/wiki/Microelectromechanical...

    MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.

  7. Gerhard M. Sessler - Wikipedia

    en.wikipedia.org/wiki/Gerhard_M._Sessler

    Gerhard M. Sessler (born 15 February 1931 in Rosenfeld, Baden-Württemberg, Germany) [1] is a German inventor and scientist. He is Professor emeritus at the Department of Electrical Engineering and Information Technology of the Technische Universität Darmstadt.

  8. Harvey C. Nathanson - Wikipedia

    en.wikipedia.org/wiki/Harvey_C._Nathanson

    The first MEMS device.. Harvey C. Nathanson (October 22, 1936 – November 22, 2019) was an American electrical engineer who, with engineer Robert A. Wickstrom, invented the first MEMS (micro-electro-mechanical systems) device of the type now found in products ranging from iPhones to automobiles.

  9. Electret microphone - Wikipedia

    en.wikipedia.org/wiki/Electret_microphone

    An electret microphone is a microphone whose diaphragm forms a capacitor (historically-termed a condenser) that incorporates an electret.