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The scanning helium microscope (SHeM) is a form of microscopy that uses low-energy (5–100 meV) neutral helium atoms to image the surface of a sample without any damage to the sample caused by the imaging process. Since helium is inert and neutral, it can be used to study delicate and insulating surfaces.
A scanning helium ion microscope (SHIM, HeIM or HIM) is an imaging technology based on a scanning helium ion beam. [2] Similar to other focused ion beam techniques, it allows to combine milling and cutting of samples with their observation at sub-nanometer resolution.
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Scanning helium microscope may refer to: Scanning helium microscopy; Scanning Helium Ion Microscope; Atomic nanoscope, which was proposed and discussed in the literature, but is not yet competitive with optical microscope, electron microscope, Scanning Helium Ion Microscope and various scanning probe microscopes
As helium ions can be focused into a small probe size and provide a much smaller sample interaction than high energy (>1 kV) electrons in the SEM, the He ion microscope can generate equal or higher resolution images with good material contrast and a higher depth of focus. Commercial instruments are capable of sub 1 nm resolution. [21] [22]
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