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MEMS resonators have operated at over a gigahertz. [61] Common bells are mechanically struck, while MEMS resonators are electrically driven. There are two base technologies used to build MEMS resonators that differ in how electrical drive and sense signals are transduced from the mechanical motion. These are electrostatic and piezoelectric. All ...
RF MEMS resonators offer the potential of on-chip integration of high-Q resonators and low-loss bandpass filters. The Q factor of RF MEMS resonators is in the order of 100–1000. [ 15 ] RF MEMS switch, switched capacitor and varactor technology, offers the tunable filter designer a compelling trade-off between insertion loss, linearity, power ...
In a free-standing resonator structure air is used to separate the resonator from the substrate/surrounding. The structure of a free-standing resonator is based on some typical manufacturing steps used in micro-electromechanical systems MEMS. A schematic cross-section of the SMR structure with a one-sided acoustic mirror
Nanomechanical resonators are frequently made of graphene. As NEMS resonators are scaled down in size, there is a general trend for a decrease in quality factor in inverse proportion to surface area to volume ratio. [24] However, despite this challenge, it has been experimentally proven to reach a quality factor as high as 2400. [25] The ...
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (magnetometer). Many of these operate by detecting effects of the Lorentz force : a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically.
Anchor losses are a type of solid damping observed in resonators operating in various environments. When a resonator is fixed to a substrate, either directly or via other structures such as tethers, mechanical waves propagate into the substrate through these connections. The wave traveling through a perfectly elastic solid would have a constant ...
Interest in piezoMEMS technology began around the early 1990s as scientists explored alternatives to electrostatic actuation in radio frequency (RF) microelectromechanical systems (MEMS). [2] For RF MEMS, electrostatic actuation specialized high voltage charge pump circuits due to small electrode gap spacing and large driving voltages.