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MEMS resonators have operated at over a gigahertz. [61] Common bells are mechanically struck, while MEMS resonators are electrically driven. There are two base technologies used to build MEMS resonators that differ in how electrical drive and sense signals are transduced from the mechanical motion. These are electrostatic and piezoelectric. All ...
RF MEMS resonators offer the potential of on-chip integration of high-Q resonators and low-loss bandpass filters. The Q factor of RF MEMS resonators is in the order of 100–1000. [ 15 ] RF MEMS switch, switched capacitor and varactor technology, offers the tunable filter designer a compelling trade-off between insertion loss, linearity, power ...
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
In a free-standing resonator structure air is used to separate the resonator from the substrate/surrounding. The structure of a free-standing resonator is based on some typical manufacturing steps used in micro-electromechanical systems MEMS. A schematic cross-section of the SMR structure with a one-sided acoustic mirror
Nanomechanical resonators are frequently made of graphene. As NEMS resonators are scaled down in size, there is a general trend for a decrease in quality factor in inverse proportion to surface area to volume ratio. [24] However, despite this challenge, it has been experimentally proven to reach a quality factor as high as 2400. [25] The ...
Variable-τ software processing was also incorporated. [9] This development improved the classical Allan variance estimators, likewise providing a direct inspiration for the work on modified Allan variance. Howe, Allan and Barnes presented the analysis of confidence intervals, degrees of freedom, and the established estimators. [9]
SiTime manufacturers silicon-based MEMS timing devices, used as an alternative to quartz timers in precision timing applications such as controlling the timing of electronic systems, managing electronic transfer of data, setting radio frequencies or measuring time. [15] It provides MEMS resonators, oscillators and clocks. [9]
A different approach to avoiding lock-in is embodied in the Multioscillator Ring Laser Gyroscope, [4] [5] wherein what is effectively two independent ring lasers (each having two counterpropagating beams) of opposite circular polarization coexist in the same ring resonator. The resonator incorporates polarization rotation (via a nonplanar ...