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Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a technology used in the semiconductor industry for manufacturing integrated circuits (ICs). It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates.
Excimer lamps are quasimonochromatic light sources operating over a wide range of wavelengths in the ultraviolet (UV) and vacuum ultraviolet (VUV) spectral regions. Operation of an excimer lamp is based on the formation of excited dimers (), which spontaneously transiting from the excited state to the ground state result in the emission of UV photons.
By 2010, GMY was the world's largest manufacturer of halogen bulbs. [4] [5] GMY opened the largest comprehensive plant factory in South China in 2015. [6] In 2017, GMY was recognized as a "Guangdong Provincial Enterprise Technology Center." [7] GMY won the "Ai Rui Cup" in 2018 as one of the China Automotive Industry's top five national brands. [3]
Theoretically, an alternative light source for photolithography, especially if and when wavelengths continue to decrease to extreme UV or X-ray, is the free-electron laser (or one might say xaser for an X-ray device). Free-electron lasers can produce high quality beams at arbitrary wavelengths.
A blacklight, also called a UV-A light, Wood's lamp, or ultraviolet light, is a lamp that emits long-wave ultraviolet light and very little visible light. [ 1 ] [ 2 ] [ 3 ] One type of lamp has a violet filter material, either on the bulb or in a separate glass filter in the lamp housing, which blocks most visible light and allows through UV ...
They would also block UV radiation. Instead, a fused quartz, UV glass, or magnesium fluoride envelope is used depending on the specific function of the lamp. [3] The typical lifetime of a deuterium lamp is approximately 2000 hours (Most manufacturers guarantee 2000 hours, but newer lamps are consistently performing well at 5000 hours and more).
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