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A capacitive fixed-fixed beam RF MEMS switch, as shown in Fig. 1(a), is in essence a micro-machined capacitor with a moving top electrode, which is the beam. It is generally connected in shunt with the transmission line and used in X- to W-band (77 GHz and 94 GHz) RF MEMS components. An ohmic cantilever RF MEMS switch, as shown in Fig. 1(b), is ...
During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems. This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is ...
MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators , offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.
The term MEMS, for Micro Electro Mechanical Systems, was coined in the 1980s to describe new, sophisticated mechanical systems on a chip, such as micro electric motors, resonators, gears, and so on. Today, the term MEMS in practice is used to refer to any microscopic device with a mechanical function, which can be fabricated in a batch process ...
The term "MEMS" was introduced in 1986. S.C. Jacobsen (PI) and J.E. Wood (Co-PI) introduced the term "MEMS" by way of a proposal to DARPA (15 July 1986), titled "Micro Electro-Mechanical Systems (MEMS)", granted to the University of Utah. The term "MEMS" was presented by way of an invited talk by S.C. Jacobsen, titled "Micro Electro-Mechanical ...
The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]
His initial research and teaching on the physics of integrated-circuit devices led to collaboration with Theodore I. Kamins of Hewlett-Packard Laboratories in writing Device Electronics for Integrated Circuits, [4] first published by John Wiley & Sons in 1977, with a second edition in 1986, and a third edition appearing in 2002.
3D view of MEMS electrothermal actuator [1]. A MEMS electrothermal actuator is a microelectromechanical device that typically generates motion by thermal expansion.It relies on the equilibrium between the thermal energy produced by an applied electric current and the heat dissipated into the environment or the substrate.