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Methyltrichlorosilane is used as a reagent in silicon carbide epitaxy to introduce chloride in the gas phase. Chloride is used to reduce the tendency of silicon to react in the gas phase and thus to increase the growth rate of the process. [6] Methyltrichlorosilane is an alternative to HCl gas or to trichlorosilane.
The methylchlorosilanes react with water to produce hydrogen chloride, giving siloxanes. In the case of trimethylsilyl chloride, the hydrolyzed product is hexamethyldisiloxane: 2 ((CH 3) 3 SiCl + H 2 O → [(CH 3) 3 Si] 2 O + 2 HCl. The analogous reaction of dimethyldichlorosilane gives siloxane polymers or rings: n (CH 3) 2 SiCl 2 + n H 2 O ...
Trichlorosilane is a reagent in the conversion of benzoic acids to toluene derivatives. In the first step of a two-pot reaction, the carboxylic acid is first converted to the trichlosilylbenzyl compound. In the second step, the benzylic silyl derivative is converted to the toluene derivative with base. [7]
The more useful products of this reaction are those for x = 1 (trimethylsilyl chloride), 2 (dimethyldichlorosilane), and 3 (methyltrichlorosilane). [1] TMS undergoes deprotonation upon treatment with butyllithium to give (H 3 C) 3 SiCH 2 Li. The latter, trimethylsilylmethyl lithium, is a relatively common alkylating agent.
Dichlorodimethylsilane is the major product of the reaction, as is expected, being obtained in about 70–90% yield. The next most abundant product is methyltrichlorosilane (MeSiCl 3), at 5–15% of the total. Other products include Me 3 SiCl (2–4%), MeHSiCl 2 (1–4%), and Me 2 HSiCl (0.1–0.5%). [1]
Methyltrimethoxysilane is usually prepared from methyltrichlorosilane and methanol: CH 3 SiCl 3 + 3 CH 3 OH → CH 3 Si(OCH 3) 3 + 3 HCl. Alcoholysis of alkylchlorosilanes typically proceeds via an S N 2 mechanism. Inversion of the configuration is favored during nucleophilic attack when displacing good leaving groups, such as chloride. [3]
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Setting aside silane itself, for which is used mainly in the microelectronics industry as a source of Si, hydrosilanes participate in many reactions. Hydrosilanes are mainly used for diverse styles of reduction in both industrial and laboratory-scale reactions. These including deoxygenation, hydrosilylation, and ionic hydrogenation.