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While standard practice MFG testing requires careful definition, monitoring and control of temperature, humidity, gaseous pollutant concentrations, volume exchange rate and airflow rate, there is considerable potential for variations in mass flow, environmental mixing and gradients in the chambers used.
A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular range of flow rates. The MFC can be given a setpoint from 0 to 100% of its full scale range but is typically operated in the 10 to 90% of full scale where the best accuracy is achieved.
The mass flow rate is the mass of the fluid traveling past a fixed point per unit time. The mass flow meter does not measure the volume per unit time (e.g. cubic meters per second) passing through the device; it measures the mass per unit time (e.g. kilograms per second) flowing through the device. Volumetric flow rate is the mass flow rate ...
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A second type is the capillary-tube type of thermal mass flow meter. Many mass flow controllers (MFC) which combine a mass flow meter, electronics and a valve are based on this design. Furthermore, a thermal mass flow meter can be built by measuring temperature differential across a silicon-based MEMS chip.
The energy flow rate is the volumetric flow rate multiplied by the energy content per unit volume or mass flow rate multiplied by the energy content per unit mass. Energy flow rate is usually derived from mass or volumetric flow rate by the use of a flow computer. In engineering contexts, the volumetric flow rate is usually given the symbol ...
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