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In mechanical accelerometers, measurement is often electrical, piezoelectric, piezoresistive or capacitive. Piezoelectric accelerometers use piezoceramic sensors (e.g. lead zirconate titanate) or single crystals (e.g. quartz, tourmaline). They are unmatched in high frequency measurements, low packaged weight, and resistance to high temperatures.
Accelerometer; Auxanometer; Capacitive displacement sensor; Capacitive sensing; Displacement sensor (general article); Flex sensor; Free fall sensor; Gravimeter ...
Figure 3. In the flat region, the sensor can be modeled as a voltage source in series with the sensor's capacitance or a charge source in parallel with the capacitance. Piezo sensors typically use the flat region of the frequency response (the "usable region" in Figure 1) between the high-pass cutoff and the resonant peak.
The high modulus of elasticity of piezoelectric materials makes the piezoelectric sensor a more viable solution to the problems identified with the strain gage accelerometer. Simply stated, the inherent properties of the piezoelectric accelerometers made it a much better alternative to the strain gage types because of its high frequency ...
The sensor circuit is supplied with constant current. A distinguishing feature of the IEPE principle is that the power supply and the sensor signal are transmitted via one shielded wire. Most IEPE sensors work at a constant current between 2 and 20 mA. A common value is 4 mA. The higher the constant current the longer the possible cable length.
Capacitive displacement sensors can be used to measure the position of objects down to the nanometer level. This type of precise positioning is used in the semiconductor industry where silicon wafers need to be positioned for exposure. Capacitive sensors are also used to pre-focus the electron microscopes used in testing and examining the wafers.
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