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In early MEMS resonator development, researchers tried to build resonators at the target application frequencies and to maintain those frequencies over temperature. Approaches to solving this problem included trimming and temperature compensating the MEMS resonators in ways analogous to those used for quartz crystal. [36] [37] [38]
The structure of a free-standing resonator is based on some typical manufacturing steps used in micro-electromechanical systems MEMS. A schematic cross-section of the SMR structure In an SMR structure acoustic mirror(s) providing an acoustic isolation is constructed between the resonator and the surrounding like the substrate.
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
RF MEMS resonators offer the potential of on-chip integration of high-Q resonators and low-loss bandpass filters. The Q factor of RF MEMS resonators is in the order of 100–1000. [ 15 ] RF MEMS switch, switched capacitor and varactor technology, offers the tunable filter designer a compelling trade-off between insertion loss, linearity, power ...
Nanomechanical resonators are frequently made of graphene. As NEMS resonators are scaled down in size, there is a general trend for a decrease in quality factor in inverse proportion to surface area to volume ratio. [24] However, despite this challenge, it has been experimentally proven to reach a quality factor as high as 2400. [25] The ...
Mems microcantilever in resonance Anchor losses are a type of damping commonly highlighted in micro-resonators . They refer to the phenomenon where energy is dissipated as mechanical waves from the resonator attenuate into the substrate.
Sand 9 developed its piezoelectric MEMS resonator technology as an alternative to quartz timing devices. [16] Sand 9 uses aluminum nitride, a thin film that is deposited using standard semiconductor/MEMS fabrication technology, for the piezoelectric layer.
Cantilevered beams are the most ubiquitous structures in the field of microelectromechanical systems (MEMS). An early example of a MEMS cantilever is the Resonistor, [7] [8] an electromechanical monolithic resonator. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si 3 N 4), or polymers.