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Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.
An optical attenuator, or fiber optic attenuator, is a device used to reduce the power level of an optical signal, either in free space or in an optical fiber. The basic types of optical attenuators are fixed, step-wise variable, and continuously variable.
The liquid crystal layer controls the polarization of light that passes through it, while the reflective layer reflects the light back towards the optical system. The silicon substrate is used to control the individual pixels and provides the necessary electronics to drive the LCos panel.
The term "MEMS" was published by way of a submitted paper by J.E. Wood, S.C. Jacobsen, and K.W. Grace, titled "SCOFSS: A Small Cantilevered Optical Fiber Servo System", in the IEEE Proceedings Micro Robots and Teleoperators Workshop, Hyannis, MA Nov. 9–11, 1987. [8] CMOS transistors have been manufactured on top of MEMS structures. [9]
LDC module with 1D microscanner and integrated optical position sensor on the back side An electrostatic 2D microscanner in a DIL20 casing MEMS scanner module for 3D distance measurement ( LIDAR ) with a single sending mirror (mirror dimensions approx. (9.5 × 2.5 mm)) and a synchronized microscanner array (2 × 7) as receiver unit.
The prior art includes an RF MEMS frequency tunable fractal antenna for the 0.1–6 GHz frequency range, [18] and the actual integration of RF MEMS switches on a self-similar Sierpinski gasket antenna to increase its number of resonant frequencies, extending its range to 8 GHz, 14 GHz and 25 GHz, [19] [20] an RF MEMS radiation pattern ...
An optical sensor can measure the changes from one or several light beams. When a change occurs, the light sensor operates as a photoelectric trigger and therefore either increases or decreases the electrical output. An optical switch enables signals in optical fibers or integrated optical circuits to be switched selectively between circuits ...
A challenge in optical detection is the need for integrating detectors and photodiodes in a miniaturized portable format on the bio-MEMS. [11] Optical detection includes fluorescence -based techniques, chemiluminescence -based techniques, and surface plasmon resonance (SPR) .
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