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  2. Microoptoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Microoptoelectromechanical...

    During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems. This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is ...

  3. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    The global market for micro-electromechanical systems, which includes products such as automobile airbag systems, display systems and inkjet cartridges totaled $40 billion in 2006 according to Global MEMS/Microsystems Markets and Opportunities, a research report from SEMI and Yole Development and is forecasted to reach $72 billion by 2011. [39]

  4. Radio-frequency microelectromechanical system - Wikipedia

    en.wikipedia.org/wiki/Radio-frequency_micro...

    A radio-frequency microelectromechanical system (RF MEMS) is a microelectromechanical system with electronic components comprising moving sub-millimeter-sized parts that provide radio-frequency (RF) functionality. [1] RF functionality can be implemented using a variety of RF technologies.

  5. Microfabrication - Wikipedia

    en.wikipedia.org/wiki/Microfabrication

    Microforming is a microfabrication process of microsystem or microelectromechanical system (MEMS) "parts or structures with at least two dimensions in the submillimeter range." [3] [4] [5] It includes techniques such as microextrusion, [4] microstamping, [6] and microcutting. [7]

  6. Piezoelectric microelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Piezoelectric_micro...

    A piezoelectric microelectromechanical system (piezoMEMS) is a miniature or microscopic device that uses piezoelectricity to generate motion and carry out its tasks. It is a microelectromechanical system that takes advantage of an electrical potential that appears under mechanical stress .

  7. Journal of Micromechanics and Microengineering - Wikipedia

    en.wikipedia.org/wiki/Journal_of_Micromechanics...

    The Journal of Micromechanics and Microengineering is a peer-reviewed scientific journal that covers all aspects of microelectromechanical systems, devices and structures, as well as micromechanics, microengineering, and microfabrication. The editor-in-chief is Weileun Fang (National Tsing Hua University).

  8. Microelectromechanical system oscillator - Wikipedia

    en.wikipedia.org/wiki/Microelectromechanical...

    Microelectromechanical system oscillators (MEMS oscillators) are devices that generate highly stable reference frequencies used to sequence electronic systems, ...

  9. MEMS magnetic actuator - Wikipedia

    en.wikipedia.org/wiki/MEMS_Magnetic_Actuator

    Micro-Electro-Mechanical System (MEMS) technology [1] is a process technology in which mechanical and electro-mechanical devices or structures are constructed using special micro-fabrication techniques. These techniques include: bulk micro-machining, surface micro-machining, LIGA, wafer bonding, etc. MEMS scale of dimensions