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The standard liter per minute (SLM or SLPM) is a unit of (molar or) mass flow rate of a gas at standard conditions for temperature and pressure (STP), which is most commonly practiced in the United States, whereas European practice revolves around the normal litre per minute (NLPM). [1]
Standard cubic centimeters per minute (SCCM) is a unit used to quantify the flow rate of a fluid. 1 SCCM is identical to 1 cm³ STP /min. Another expression of it would be Nml/min.
A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular range of flow rates. The MFC can be given a setpoint from 0 to 100% of its full scale range but is typically operated in the 10 to 90% of full scale where the best accuracy is achieved.
The flow is proportional to the absolute inlet pressure, so the flow in scfm would equal the C v flow coefficient if the inlet pressure were reduced to 2 psia and the outlet were connected to a vacuum with less than 1 psi absolute pressure (1.0 scfm when C v = 1.0, 2 psia input).
A control valve is a valve used to control fluid flow by varying the size of the flow passage as directed by a signal from a controller. [1] This enables the direct control of flow rate and the consequential control of process quantities such as pressure , temperature , and liquid level.
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