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Trichlorosilane (TCS) is an inorganic compound with the formula HCl 3 Si. It is a colourless, volatile liquid. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry.
Silicon tetrachloride and trichlorosilane are intermediates in the production of ultrapure silicon in the semiconductor industry. Chlorosilanes obtained from crude silicon are purified by fractional distillation techniques and then reduced with hydrogen to give silicon of 99.999 999 999 % purity.
Silane (Silicane) is an inorganic compound with chemical formula SiH 4. It is a colorless, pyrophoric , toxic gas with a sharp, repulsive, pungent smell, somewhat similar to that of acetic acid . [ 5 ]
Another important member is trichlorosilane (SiHCl 3). Organosilanes are a class of charge-neutral organosilicon compounds. Example: tetramethylsilane (Si(CH 3) 4) By tradition, compounds with Si-O-Si bonds are usually not referred to as silanes. Instead, they are called siloxanes. One example is hexamethyldisiloxane, ((CH 3) 3 Si) 2 O.
One use for methyltrichlorosilane is in the production of methyl silicone resins (highly crosslinked polymers). Because of the stability of the cross-linked polymers resulting from condensation, the resin is stable to 550 °C in a vacuum, making it an ideal material for electrical insulation at high temperatures. [ 1 ]
Trichlorosilane is produced commercially by the reaction of hydrogen chloride with silicon: Si + 3 HCl → HSiCl 3 + H 2. Many alkoxy hydrosilanes are generated by alcoholysis of trichlorosilane. One example is triethoxysilane: HSiCl 3 + 3 EtOH → HSi(OEt) 3 + 3 HCl
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It is reduced to trichlorosilane (HSiCl 3) by hydrogen gas in a hydrogenation reactor, and either directly used in the Siemens process or further reduced to silane (SiH 4) and injected into a fluidized bed reactor. Silicon tetrachloride reappears in both these two processes as a by-product and is recycled in the hydrogenation reactor.