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Trichlorosilane (TCS) is an inorganic compound with the formula HCl 3 Si. It is a colourless, volatile liquid. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry.
Stock and Somieski completed the hydrolysis of dichlorosilane by putting the solution of H 2 SiCl 2 in benzene in brief contact with a large excess of water. [3] [5] A large-scale hydrolysis was done in a mixed ether/alkane solvent system at 0 °C, which gave a mixture of volatile and nonvolatile [H 2 SiO] n.
It is also prepared from metallurgical-grade silicon in a two-step process. First, silicon is treated with hydrogen chloride at about 300 °C to produce trichlorosilane, HSiCl3, along with hydrogen gas, according to the chemical equation. Si + 3 HCl → HSiCl 3 + H 2. The trichlorosilane is then converted to a mixture of silane and silicon ...
Melting point: −77 °C (−107 °F; 196 K) Boiling point: ... Methyltrichlorosilane is an alternative to HCl gas or to trichlorosilane. References
Trichlorosilane: Chemical formula: H Si Cl 3: Appearance: Colourless liquid: Physical. Molar mass: 135.5 g/mol: Melting point: 146 K (-127 °C) Boiling point: 305 K ...
For example, the melting point of silicon at ambient pressure (0.1 MPa) is 1415 °C, but at pressures in excess of 10 GPa it decreases to 1000 °C. [13] Melting points are often used to characterize organic and inorganic compounds and to ascertain their purity. The melting point of a pure substance is always higher and has a smaller range than ...
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Like other chlorosilanes or silanes, silicon tetrachloride reacts readily with water: . SiCl 4 + 2 H 2 O → SiO 2 + 4 HCl. The reaction can be noticed on exposure of the liquid to air, as SiCl 4 vapour produces fumes as it reacts with moisture to give a cloud-like aerosol of silica and hydrochloric acid. [6]