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The need for a single standard for cleanroom classification and testing was long felt. After ANSI and IEST petitioned to ISO for new standards, the first document of ISO 14644 was published in 1999, ISO 14644-1. [1] In 2000, ISO 14644-2 was published, which began the process of FED-STD-209E being canceled.
The aim of cleanroom suitability tests is to determine the suitability of machines and operating utilities (air conditioning, venting, etc.) for use in cleanrooms. The tests must be carried out using measurement techniques as particle emission behavior cannot be adequately assessed by the naked eye or similar means.
FED-STD-209 E Airborne Particulate Cleanliness Classes in Cleanrooms and Cleanzones was a federal standard concerning classification of air cleanliness, intended for use in environments like cleanrooms. The standard based its classifications on the measurement of airborne particles. [1]
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A common controlled environment aerosol particle counters are used in is a cleanroom. Cleanrooms are used extensively in semiconductor device fabrication, biotechnology, pharmaceuticals, disk drives, aerospace and other fields that are very sensitive to environmental contamination. Cleanrooms have defined particle count limits.
Cleanliness suitability describes the suitability of operating materials and ventilation and air conditioning components for use in cleanrooms where the air cleanliness and other parameters are controlled by way of technical regulations. Tests are carried out to determine this.
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A cleanroom or clean room is an engineered space that maintains a very low concentration of airborne particulates. It is well isolated, well controlled from contamination , and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as semiconductor manufacturing.