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Transitioning from a SMIF pod to a FOUP design, the removable cassette used to hold wafers was replaced by fixed wafer columns. The door was relocated from a bottom orientation to a front orientation, where automated handling equipment can access the wafers. Pitch for a 300 mm FOUP is 10 mm, while 13 slot FOUPs can have a pitch up to 20 mm.
The insulating material has traditionally been a form of SiO 2 or a silicate glass, but recently new low dielectric constant materials, also called low-κ dielectrics, are being used (such as silicon oxycarbide), typically providing dielectric constants around 2.7 (compared to 3.82 for SiO 2), although materials with constants as low as 2.2 are ...
Both wafers and reticles can be handled by SMIF pods in a semiconductor fabrication environment. Used in lithographic tools, reticles or photomasks contain the image that is exposed on a coated wafer in one processing step of a complete integrated semiconductor manufacturing cycle. Because reticles are linked so directly with wafer processing ...
iThink - system dynamics and discrete event modeling software for business strategy, public policy, and education. Developed by isee systems. JMAG - simulation software for electric device design and development. Khimera - a chemical kinetics simulation software tool developed by Kintech Lab.
Wright's Biscuits transfer line: production flow without batching. A transfer line is a manufacturing system which consists of a predetermined sequence of machines connected by an automated material handling system and designed for working on a very small family of parts.
The first LOC analysis system was a gas chromatograph, developed in 1979 by S.C. Terry at Stanford University. [ 2 ] [ 3 ] However, only at the end of the 1980s and beginning of the 1990s did the LOC research start to seriously grow as a few research groups in Europe developed micropumps, flowsensors and the concepts for integrated fluid ...
A semiconductor manufacturer will typically require a new probe card for each new device wafer and for device shrinks (when the manufacturer reduces the size of the device while keeping its functionality) because the probe card is effectively a custom connector that takes the universal pattern of a given tester and translates the signals to ...
An automated probe station by Cascade Microtech A mechanical probe station is used to physically acquire signals from the internal nodes of a semiconductor device. The probe station utilizes manipulators which allow the precise positioning of thin needles on the surface of a semiconductor device.
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