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  2. Cleanroom - Wikipedia

    en.wikipedia.org/wiki/Cleanroom

    A cleanroom or clean room is an engineered space that maintains a very low concentration of airborne particulates. It is well isolated, well controlled from contamination , and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as semiconductor manufacturing.

  3. Clean air delivery rate - Wikipedia

    en.wikipedia.org/wiki/Clean_Air_Delivery_Rate

    This recommendation is based on the assumption that the room will have air exchanged with other rooms at a rate of less than 1 room volume per hour, and that the customer desires at least 80% of the smoke particles removed from the air. For an 8-foot (2.4 m) high room, this means the room volume should be less than or equal to 12 times the CADR ...

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  5. Fan filter unit - Wikipedia

    en.wikipedia.org/wiki/Fan_filter_unit

    FFUs are typically manufactured in 4' x 2', 3' x 2', or 2' x 2' steel housings, which can be placed in ceiling grid bays of similar dimensions. [2] Units often contain a pre-filter as well as a HEPA (high-efficiency particulate air), ULPA (ultra-low particulate air) or other MERV (minimum efficiency reporting value) filter.

  6. Semiconductor fabrication plant - Wikipedia

    en.wikipedia.org/wiki/Semiconductor_fabrication...

    In the microelectronics industry, a semiconductor fabrication plant, also called a fab or a foundry, is a factory where integrated circuits (ICs) are manufactured. [1]The cleanroom is where all fabrication takes place and contains the machinery for integrated circuit production such as steppers and/or scanners for photolithography, etching, cleaning, and doping.

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  8. Air changes per hour - Wikipedia

    en.wikipedia.org/wiki/Air_changes_per_hour

    Air changes per hour, abbreviated ACPH or ACH, or air change rate is the number of times that the total air volume in a room or space is completely removed and replaced in an hour. If the air in the space is either uniform or perfectly mixed, air changes per hour is a measure of how many times the air within a defined space is replaced each hour.

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