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A FIB workstation. Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).
Another common use of FIB instruments is for design verification and/or failure analysis of semiconductor devices. Design verification combines selective material removal with gas-assisted material deposition of conductive, dielectric, or insulating materials.
Ion-beam lithography has been found to be useful for transferring high-fidelity patterns on three-dimensional surfaces. [2]Ion-beam lithography offers higher resolution patterning than UV, X-ray, or electron beam lithography because these heavier particles have more momentum.
The technique is used in semiconductor failure analysis to locate buried diffusion regions, damaged junctions and gate oxide shorts. [1]The OBIC technique may be used to detect the point at which a focused ion beam (FIB) milling operation in bulk silicon of an IC must be terminated (also known as endpoint).
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FEI's introduction of the liquid metal ion source in 1981 led to its application in the semiconductor industry for mask repair and defect analysis. [5] The current company was formed by the 1997 merger between FEI and Philips Electron Optics, [ 6 ] and the 1999 acquisition of ion beam company Micrion.
TESCAN is one of the world's leading manufacturers of Scanning Electron Microscopes (SEM), Focused Ion Beam-Scanning Electron Microscopes (FIB-SEM), Scanning Transmission Electron Microscopes (STEM), and microcomputed tomography (microCT). TESCAN serves customers in materials science, geosciences, life sciences and semiconductor markets.
An FIB makes a small portion of the material into a plasma; the analysis is done by the same basic techniques as the ones used in mass spectrometry. When the ion energy is higher, hundreds of keV to a few MeV (mega-electronvolt) they are called nuclear microprobes.
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