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Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a technology used in the semiconductor industry for manufacturing integrated circuits (ICs). It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates.
TSMC was the first foundry to market 7-nanometre and 5-nanometre (used by the 2020 Apple A14 and M1 SoCs, the MediaTek Dimensity 8100, and AMD Ryzen 7000 series processors) production capabilities, and the first to commercialize ASML's extreme ultraviolet (EUV) lithography technology in high volume.
13.5 nm extreme ultraviolet (EUV) lithography, long considered a leading candidate for next-generation lithography, began to enter commercial mass-production in 2018. [1] As of 2021, Samsung and TSMC were gradually phasing EUV lithography into their production lines, as it became economical to replace multiple processing steps with single EUV ...
AMSTERDAM (Reuters) -Taiwanese chipmaker TSMC does not necessarily need to use ASML's next generation "High NA EUV" machines for an upcoming generation of chip manufacturing technology called A16 ...
TSMC and Samsung successfully adopted EUV lithography first, vital to today's advanced chipmaking. Meanwhile, a former high-level executive said Intel had 10 EUV machines worth more than $1 ...
The head of technology development at Intel, Ann Kelleher, first mentioned the progress during a talk at the SPIE lithography conference on Tuesday in San Jose. ASML confirmed Kelleher's remarks ...
ASML's best-selling EUV product has been the TWINSCAN NXE:3600D, which costs up to $200 million. [2] Shipping the machine the size of a truck requires moving 180 tons with three Boeing 747s. [18] ASML is working on the next generation of EUV systems, with the first shipments for R&D purposes shipped to Intel in December 2023, and TSMC in late 2024.
SANTA CLARA, California (Reuters) -Taiwan Semiconductor Manufacturing Co said on Wednesday that a new chip manufacturing technology called "A16" will enter production in the second half of 2026 ...