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Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a technology used in the semiconductor industry for manufacturing integrated circuits (ICs). It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates.
In April 2017, TSMC began risk production of 256Mbit SRAM memory chips using a "7nm" (N7FF+) process, [2] with extreme ultraviolet lithography (EUV). [24] TSMC's "7nm" production plans, as of early 2017, [needs update] was to use deep ultraviolet (DUV) immersion lithography initially on this process node (N7FF), and transition from risk to ...
TSMC was the first foundry to market 7-nanometre and 5-nanometre (used by the 2020 Apple A14 and M1 SoCs, the MediaTek Dimensity 8100, and AMD Ryzen 7000 series processors) production capabilities, and the first to commercialize ASML's extreme ultraviolet (EUV) lithography technology in high volume.
TSMC, the world's biggest contract chipmaker, is the largest user of ASML's regular EUV machines. "I like the technology but I don't like the sticker price", Zhang told reporters.
However, according to reports, TSMC may not need these high-NA EUV machines for mass production until at least 2030. Nonetheless, with TSMC still needing to increase production and build more ...
ASML's High NA EUV tools, which are the size of a double decker bus and cost more than $350 million each, are expected to help enable new generations of smaller, faster chips.
ASML's best-selling EUV product has been the TWINSCAN NXE:3600D, which costs up to $200 million. [2] Shipping the machine the size of a truck requires moving 180 tons with three Boeing 747s. [18] ASML is working on the next generation of EUV systems, with the first shipments for R&D purposes shipped to Intel in December 2023, and TSMC in late 2024.
Back in 2014, Apple shifted its chip orders from Samsung to TSMC and funded the Taiwanese chipmaker's initial purchases of ASML's extreme ultraviolet (EUV) lithography systems. TSMC's early ...