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A cleanroom or clean room is an engineered space that maintains a very low concentration of airborne particulates. It is well isolated, well controlled from contamination , and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as semiconductor manufacturing.
Cleanroom suitability describes the suitability of a machine, operating utility, material, etc. for use in a cleanroom, where air cleanliness and other parameters are ...
In the microelectronics industry, a semiconductor fabrication plant, also called a fab or a foundry, is a factory where integrated circuits (ICs) are manufactured. [1]The cleanroom is where all fabrication takes place and contains the machinery for integrated circuit production such as steppers and/or scanners for photolithography, etching, cleaning, and doping.
The fabrication process is performed in highly specialized semiconductor fabrication plants, also called foundries or "fabs", [1] with the central part being the "clean room". In more advanced semiconductor devices, such as modern 14/10/7 nm nodes, fabrication can take up to 15 weeks, with 11–13 weeks being the industry average. [2]
Main electrical distribution room in a large building. The back of an antique electrical room, still operational at a US plant as of 2014. All conducting busbars are open and operators must be careful not to touch them. An electrical room is a technical room or space in a building dedicated to electrical equipment. Its size is usually ...
Filter ceiling grid of a cleanroom for microelectronic (semiconductor) manufacturing with filter fan units installed A fan filter unit ( FFU ) is a type of motorized air filtering equipment. It is used to supply purified air to cleanrooms , laboratories , medical facilities or microenvironments by removing harmful airborne particles from ...
ISO 14644 Standards were first formed from the US Federal Standard 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones. The need for a single standard for cleanroom classification and testing was long felt.
Although the clean-room approach had been used as preventative measure in view of possible litigation before (e.g. in the Phoenix BIOS case), the NEC v. Intel case was the first time that the clean-room argument was accepted in a US court trial. A related aspect worth mentioning here is that NEC did have a license for Intel's patents governing ...