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A cleanroom or clean room is an ... and denote the number of particles of size 0.5 μm or larger permitted per cubic foot of air. ... Totalling 70,000 square feet, it ...
This recommendation is based on the assumption that the room will have air exchanged with other rooms at a rate of less than 1 room volume per hour, and that the customer desires at least 80% of the smoke particles removed from the air. For an 8-foot (2.4 m) high room, this means the room volume should be less than or equal to 12 times the CADR ...
Process ductwork is often large (6-foot diameter to 18-foot diameter), carrying large volumes of hot dirty gasses, at velocities of 3000 to 4500 feet per minute. The fans used to move these gasses are also large, 250 to 4000 horsepower. Therefore, minimizing duct pressure drop by minimizing turbulence at elbows and transitions is of importance.
In the microelectronics industry, a semiconductor fabrication plant, also called a fab or a foundry, is a factory where integrated circuits (ICs) are manufactured. [1]The cleanroom is where all fabrication takes place and contains the machinery for integrated circuit production such as steppers and/or scanners for photolithography, etching, cleaning, and doping.
Clean air delivery rate (CADR) is the amount of clean air an air cleaner provides to a room or space. When determining CADR, the amount of airflow in a space is taken into account. For example, an air cleaner with a flow rate of 30 cubic metres (1,000 cu ft) per minute and an efficiency of 50% has a CADR of 15 cubic metres (500 cu ft) per minute.
For example, a space requiring 5663 standard litre per minute (SLPM) (200 standard cubic feet per minute (SCFM)) of ventilation air and served with supply air that is 40% ventilation air, will require a box minimum setting of 14158 SLPM (500 SCFM) (i.e. 200/0.4) rather than the conventional practice of 5663 SLPM (200 SCFM). When the box ...
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