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Trichlorosilane (TCS) is an inorganic compound with the formula HCl 3 Si. It is a colourless, volatile liquid. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry.
Silicon tetrachloride and trichlorosilane are intermediates in the production of ultrapure silicon in the semiconductor industry. Chlorosilanes obtained from crude silicon are purified by fractional distillation techniques and then reduced with hydrogen to give silicon of 99.999 999 999 % purity.
Methyltrichlorosilane is an alternative to HCl gas or to trichlorosilane. References This page was last edited on 28 December 2024, at 22:04 ...
GT Advanced Technologies New High Volume Hydrochlorination FBR Solution Doubling Trichlorosilane Capacity from a Single FBR Reactor GT technologies enable polysilicon production at less than $14 ...
Trichlorosilane is produced commercially by the reaction of hydrogen chloride with silicon: Si + 3 HCl → HSiCl 3 + H 2. Many alkoxy hydrosilanes are generated by alcoholysis of trichlorosilane. One example is triethoxysilane: HSiCl 3 + 3 EtOH → HSi(OEt) 3 + 3 HCl
Another important member is trichlorosilane (SiHCl 3). Organosilanes are a class of charge-neutral organosilicon compounds. Example: tetramethylsilane (Si(CH 3) 4) By tradition, compounds with Si-O-Si bonds are usually not referred to as silanes. Instead, they are called siloxanes. One example is hexamethyldisiloxane, ((CH 3) 3 Si) 2 O.
Speculation on silicon hydride chemistry started in the 1830s, contemporary with the development of synthetic organic chemistry. Silane itself, as well as trichlorosilane, were first synthesised by Friedrich Wöhler and Heinrich Buff in 1857 by reacting aluminium–silicon alloys with hydrochloric acid, and characterised as SiH
A well studied reaction is the addition of trichlorosilane to styrene to give 1-phenyl-1-(trichlorosilyl)ethane: Cl 3 SiH + PhCH=CH 2 → (Ph)(CH 3)CHSiCl 3. Nearly perfect enantioselectivities (ee's) can be achieved using palladium catalysts supported by binaphthyl-substituted monophosphine ligands. [6]