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Piranha solution, also known as piranha etch, is a mixture of sulfuric acid (H 2 SO 4) and hydrogen peroxide (H 2 O 2). The resulting mixture is used to clean organic residues off substrates , for example silicon wafers . [ 1 ]
Etching tanks used to perform Piranha, hydrofluoric acid or RCA clean on 4-inch wafer batches at LAAS technological facility in Toulouse, France. Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module in fabrication, and every wafer ...
The optional second step (for bare silicon wafers) is a short immersion in a 1:100 or 1:50 solution of aqueous HF (hydrofluoric acid) at 25 °C for about fifteen seconds, in order to remove the thin oxide layer and some fraction of ionic contaminants. If this step is performed without ultra high purity materials and ultra clean containers, it ...
Aqua regia is also used in etching and in specific analytic procedures. It is also used in some laboratories to clean glassware of organic compounds and metal particles. This method is preferred among most over the more traditional chromic acid bath for cleaning NMR tubes, because no traces of paramagnetic chromium can remain to spoil spectra. [1]
Piranha solution in particular constitutes quite a harsh treatment that can potentially damage the integrity of the silicon surface. Finlayson-Pitts et al. investigated the effect of certain treatments on silicon and concluded that both the roughness (3-5 Å) and the presence of scattered large particles were preserved after 1 cycle of plasma ...
One laboratory scale preparation of Caro's acid involves the combination of chlorosulfuric acid and hydrogen peroxide: [6]. H 2 O 2 + ClSO 2 OH ⇌ H 2 SO 5 + HCl. Patents include more than one reaction for preparation of Caro's acid, usually as an intermediate for the production of potassium monopersulfate (PMPS), a bleaching and oxidizing agent.
Using piranha solution to clean fritted glassware is a huge safety no-no and this article should not be proposing it as reasonable practice in any lab environment. 198.179.125.170 17:46, 14 November 2018 (UTC) Is the problem with piranha and frits, or with piranha and frits which still have organic solvents on them? Certainly the second has a ...
Chromic acid is an intermediate in chromium plating, and is also used in ceramic glazes, and colored glass. Because a solution of chromic acid in sulfuric acid (also known as a sulfochromic mixture or chromosulfuric acid) is a powerful oxidizing agent, it can be used to clean laboratory glassware, particularly of otherwise insoluble organic ...