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  2. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm 2. [1]

  3. Microelectromechanical system oscillator - Wikipedia

    en.wikipedia.org/wiki/Microelectromechanical...

    MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.

  4. Radio-frequency microelectromechanical system - Wikipedia

    en.wikipedia.org/wiki/Radio-frequency_micro...

    The prior art includes an RF MEMS frequency tunable fractal antenna for the 0.1–6 GHz frequency range, [18] and the actual integration of RF MEMS switches on a self-similar Sierpinski gasket antenna to increase its number of resonant frequencies, extending its range to 8 GHz, 14 GHz and 25 GHz, [19] [20] an RF MEMS radiation pattern ...

  5. Microoptoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Microoptoelectromechanical...

    In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...

  6. Nanoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Nanoelectromechanical_systems

    NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

  7. Smartdust - Wikipedia

    en.wikipedia.org/wiki/Smartdust

    Smartdust [1] is a system of many tiny microelectromechanical systems (MEMS) such as sensors, robots, or other devices, that can detect, for example, light, temperature, vibration, magnetism, or chemicals.

  8. Microtechnology - Wikipedia

    en.wikipedia.org/wiki/Microtechnology

    The term MEMS, for Micro Electro Mechanical Systems, was coined in the 1980s to describe new, sophisticated mechanical systems on a chip, such as micro electric motors, resonators, gears, and so on. Today, the term MEMS in practice is used to refer to any microscopic device with a mechanical function, which can be fabricated in a batch process ...

  9. Projection micro-stereolithography - Wikipedia

    en.wikipedia.org/wiki/Projection_micro-stereo...

    The appearance of the Projection Micro-stereolithography improves the development of MEMS by achieving most of the requirements above. This invention is based on the stereolithography (3D printing), which developed by Charles Hull in 1984. This machine is primarily used to fabricate soft materials such as hydro gels and polymers.