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Interior view of a turbomolecular pump. A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [1] [2] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
The term "roughing pump" derives from the vacuum range it works in, "rough vacuum", above 1x10 −3 torr (0.1 Pa). Pumps that operate in the high vacuum ranges typically don't operate, or only operate inefficiently, at atmospheric pressures, whereas pumps that work efficiently at atmospheric pressure usually cannot produce a vacuum lower than ...
There is no single vacuum pump that can operate all the way from atmospheric pressure to ultra-high vacuum. Instead, a series of different pumps is used, according to the appropriate pressure range for each pump. In the first stage, a roughing pump clears most of the gas from the chamber. This is followed by one or more vacuum pumps that ...
A turbopump is a propellant pump with two main components: a rotodynamic pump and a driving gas turbine, usually both mounted on the same shaft, or sometimes geared together. They were initially developed in Germany in the early 1940s. The purpose of a turbopump is to produce a high-pressure fluid for feeding a combustion chamber or other use ...
Vacuum systems usually consist of gauges, vapor jet and pumps, vapor traps and valves along with other extensional piping. A vessel that is operating under vacuum system may be any of these types such as processing tank, steam simulator, particle accelerator, or any other type of space that has an enclosed chamber to maintain the system in less than atmospheric gas pressure.
An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.
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A special form of the Pirani gauge is the pulsed Pirani vacuum gauge where the sensor wire is not operated at a constant temperature, but is cyclically heated up to a certain temperature threshold by an increasing voltage ramp. When the threshold is reached, the heating voltage is switched off and the sensor cools down again.
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