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A scanning helium ion microscope (SHIM, HeIM or HIM) is an imaging technology based on a scanning helium ion beam. [2] Similar to other focused ion beam techniques, it allows to combine milling and cutting of samples with their observation at sub-nanometer resolution.
The scanning helium microscope (SHeM) is a form of microscopy that uses low-energy (5–100 meV) neutral helium atoms to image the surface of a sample without any damage to the sample caused by the imaging process. Since helium is inert and neutral, it can be used to study delicate and insulating surfaces.
As helium ions can be focused into a small probe size and provide a much smaller sample interaction than high energy (>1 kV) electrons in the SEM, the He ion microscope can generate equal or higher resolution images with good material contrast and a higher depth of focus. Commercial instruments are capable of sub 1 nm resolution. [21] [22]
Scanning helium microscope may refer to: Scanning helium microscopy; Scanning Helium Ion Microscope; Atomic nanoscope, which was proposed and discussed in the literature, but is not yet competitive with optical microscope, electron microscope, Scanning Helium Ion Microscope and various scanning probe microscopes
Researchers are currently studying the use of ion beam analysis in conjunction with a scanning electron microscope and an Energy Dispersive X-ray spectrometer (SEM-EDS). [8] The hope is that this setup will detect the composition of new and old chemicals that older analyses could not efficiently detect in the past. [ 8 ]
Ion-beam lithography, or ion-projection lithography, is similar to Electron beam lithography, but uses much heavier charged particles, ions. In addition to diffraction being negligible, ions move in straighter paths than electrons do both through vacuum and through matter, so there seems be a potential for very high resolution.
They produced their first mass spectrometer in 1963, and their first scanning electron microscope in 1966. In 1968, they produced the first amino acid analyzer in the world, the JLC-5AH. [ 12 ] The company also continued to develop its line of electron microscopes.
An ion beam is a beam of ions, a type of charged particle beam. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. There are many ion beam sources, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most widely used ion beams are of singly-charged ions.
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