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  2. Turbomolecular pump - Wikipedia

    en.wikipedia.org/wiki/Turbomolecular_pump

    The system is an axial compressor that puts energy into the gas, rather than a turbine, which takes energy out of a moving fluid to create rotary power, thus "turbomolecular pump" is a misnomer. Gas captured by the upper stages is pushed into the lower stages and successively compressed to the level of the fore-vacuum (backing pump) pressure.

  3. Reactive-ion etching - Wikipedia

    en.wikipedia.org/wiki/Reactive-ion_etching

    A typical (parallel plate) RIE system consists of a cylindrical vacuum chamber, with a wafer platter situated in the bottom portion of the chamber. The wafer platter is electrically isolated from the rest of the chamber. Gas enters through small inlets in the top of the chamber, and exits to the vacuum pump system through the

  4. Getter - Wikipedia

    en.wikipedia.org/wiki/Getter

    Getter pump or sorption pump In laboratory vacuum systems, the bulk NEG getter is often held in a separate vessel with its own heater, attached to the vacuum system by a valve, so that it can be replaced or renewed when saturated. [8] Ion getter pump Uses a high voltage electrode to ionize the gas molecules and drive them into the getter surface.

  5. Vacuum pump - Wikipedia

    en.wikipedia.org/wiki/Vacuum_pump

    Vacuum pumps are combined with chambers and operational procedures into a wide variety of vacuum systems. Sometimes more than one pump will be used (in series or in parallel) in a single application. A partial vacuum, or rough vacuum, can be created using a positive displacement pump that transports a gas load from an inlet port to an outlet ...

  6. Varian, Inc. - Wikipedia

    en.wikipedia.org/wiki/Varian,_Inc.

    They had offerings over a broad range of chemical analysis equipment, with a particular focus on Information Rich Detection [clarification needed] and Vacuum technology. Varian was spun off from Varian Associates in 1999 and was purchased by Agilent Technologies in May 2010 for $1.5 billion, or $52 per share.

  7. Vacuum engineering - Wikipedia

    en.wikipedia.org/wiki/Vacuum_engineering

    Vacuum systems usually consist of gauges, vapor jet and pumps, vapor traps and valves along with other extensional piping. A vessel that is operating under vacuum system may be any of these types such as processing tank, steam simulator, particle accelerator, or any other type of space that has an enclosed chamber to maintain the system in less than atmospheric gas pressure.

  8. Rotary vane pump - Wikipedia

    en.wikipedia.org/wiki/Rotary_vane_pump

    Furthermore, vane pumps can be used in low-pressure gas applications such as secondary air injection for auto exhaust emission control, or in low-pressure chemical vapor deposition systems [citation needed]. Rotary-vane pumps are also a common type of vacuum pump, with two-stage pumps able to reach pressures well below 10 −6 bar.

  9. Turn and slip indicator - Wikipedia

    en.wikipedia.org/wiki/Turn_and_slip_indicator

    Thus one can now legally replace a Turn-and-Slip or Turn Coordinator instrument with a second attitude indicator, preferably driven by a system different from the primary flight display. So if the aircraft primary display is vacuum powered, the second attitude indicator should be electric, and vice-versa.

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