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As the diagram on the right shows, the gallium (Ga+) primary ion beam hits the sample surface and sputters a small amount of material, which leaves the surface as either secondary ions (i+ or i−) or neutral atoms (n 0). The primary beam also produces secondary electrons (e −). As the primary beam rasters on the sample surface, the signal ...
The basic layout of an ion beam apparatus is an accelerator which produces an ion beam that is feed through an evacuated beam-transport tube to a beam handling device. This device isolates the ion species and charge of interest which then are transported through an evacuated beam-transport tube into the target chamber.
Ion beam mixing can be further enhanced by heat spike effects [4] Ion mixing (IM) is essentially similar in result to interdiffusion, hence most models of ion mixing involve an effective diffusion coefficient that is used to characterize thickness of the reacted layer as a function of ion beam implantation over a period of time.
A small ion beam rocket being tested by NASA. An ion beam is a beam of ions, a type of charged particle beam. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. There are many ion beam sources, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most widely ...
Ion beam deposition (IBD) is a process of applying materials to a target through the application of an ion beam. [1] Ion beam deposition setup with mass separator. An ion beam deposition apparatus typically consists of an ion source, ion optics, and the deposition target. Optionally a mass analyzer can be incorporated. [2]
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The ion current density (or similarly the ion flux), the ion energy spread, and the resolution of the ion beam are key factors in ion gun design. The ion current density is controlled by the ion source , the energy spread is determined primarily by the extraction grid, and the resolution is determined primarily by the optical column.
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