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  2. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.

  3. Microfabrication - Wikipedia

    en.wikipedia.org/wiki/Microfabrication

    Microforming is a microfabrication process of microsystem or microelectromechanical system (MEMS) "parts or structures with at least two dimensions in the submillimeter range." [3] [4] [5] It includes techniques such as microextrusion, [4] microstamping, [6] and microcutting. [7]

  4. Radio-frequency microelectromechanical system - Wikipedia

    en.wikipedia.org/wiki/Radio-frequency_micro...

    The prior art includes an RF MEMS frequency tunable fractal antenna for the 0.1–6 GHz frequency range, [18] and the actual integration of RF MEMS switches on a self-similar Sierpinski gasket antenna to increase its number of resonant frequencies, extending its range to 8 GHz, 14 GHz and 25 GHz, [19] [20] an RF MEMS radiation pattern ...

  5. Bulk micromachining - Wikipedia

    en.wikipedia.org/wiki/Bulk_micromachining

    Bulk micromachining [1] is a process used to produce micromachinery or microelectromechanical systems (MEMS).. Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate.

  6. Microelectromechanical system oscillator - Wikipedia

    en.wikipedia.org/wiki/Microelectromechanical...

    MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.

  7. Deep reactive-ion etching - Wikipedia

    en.wikipedia.org/wiki/Deep_reactive-ion_etching

    Deep reactive-ion etching (DRIE) is a special subclass of reactive-ion etching (RIE). It enables highly anisotropic etch process used to create deep penetration, steep-sided holes and trenches in wafers/substrates, typically with high aspect ratios.

  8. Nanoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Nanoelectromechanical_systems

    NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

  9. MEMS testing - Wikipedia

    en.wikipedia.org/wiki/MEMS_testing

    To test MEMS researchers came up with a wide variety of techniques that can display certain values. However, there is no single technology that can cover all; each has strengths as well as weaknesses. Below is a list with all major and some minor technologies employed in MEMS testing: Atomic force microscopy (AFM) Confocal microscopy (CM)

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