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The term "MEMS" was introduced in 1986. S.C. Jacobsen (PI) and J.E. Wood (Co-PI) introduced the term "MEMS" by way of a proposal to DARPA (15 July 1986), titled "Micro Electro-Mechanical Systems (MEMS)", granted to the University of Utah. The term "MEMS" was presented by way of an invited talk by S.C. Jacobsen, titled "Micro Electro-Mechanical ...
The list below provides an overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries . The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.
Micro-Electro-Mechanical System (MEMS) technology [1] is a process technology in which mechanical and electro-mechanical devices or structures are constructed using special micro-fabrication techniques. These techniques include: bulk micro-machining, surface micro-machining, LIGA, wafer bonding, etc. MEMS scale of dimensions
3D view of MEMS electrothermal actuator [1]. A MEMS electrothermal actuator is a microelectromechanical device that typically generates motion by thermal expansion.It relies on the equilibrium between the thermal energy produced by an applied electric current and the heat dissipated into the environment or the substrate.
MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators , offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.
The term MEMS, for Micro Electro Mechanical Systems, was coined in the 1980s to describe new, sophisticated mechanical systems on a chip, such as micro electric motors, resonators, gears, and so on. Today, the term MEMS in practice is used to refer to any microscopic device with a mechanical function, which can be fabricated in a batch process ...
Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems , or MEMS devices.
It was developed for microelectromechanical systems (MEMS), which require these features, but is also used to excavate trenches for high-density capacitors for DRAM and more recently for creating through-silicon vias in advanced 3D wafer level packaging technology.