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In 1984, Edwards developed and patented the first practical high vacuum dry (no-oil) pump. The design was taken up by the fast-growing semiconductor manufacturing market. [ 17 ] In 1992, Edwards purchased Electrotech Ltd's semiconductor manufacturing exhaust gas management systems.
A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
In the field of oil regeneration and re-refining, vacuum pumps create a low vacuum for oil dehydration and a high vacuum for oil purification. [44] A vacuum may be used to power, or provide assistance to mechanical devices. In hybrid and diesel engine motor vehicles, a pump fitted on the engine (usually on the camshaft) is used to produce a vacuum.
An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.
Most general pumps can increase as well as decrease the pressure of a gas; however, this category contains pumps that are usually exclusively used to decrease pressure. Wikimedia Commons has media related to Vacuum pumps .
The NEG acts as a getter or getter pump that is able to reduce the pressure to less than 10 −12 mbar. Non-evaporable getters , which work at high temperature, generally consist of a film of a special alloy, often primarily zirconium ; the requirement is that the alloy materials must form a passivation layer at room temperature which ...
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