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Ion beam analysis (IBA) is an important family of modern analytical techniques involving the use of MeV ion beams to probe the composition and obtain elemental depth profiles in the near-surface layer of solids. IBA is not restricted to MeV energy ranges.
IBA (Ion Beam Applications SA) is a medical technology company based in Louvain-la-Neuve. The company was founded in 1986 by Yves Jongen within the Cyclotron Research Center of the University of Louvain (UCLouvain) and became a university spin-off. It employs about 1500 people in 40 locations. [1]
A small ion beam rocket being tested by NASA. An ion beam is a beam of ions, a type of charged particle beam. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. There are many ion beam sources, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most widely ...
Ion beam deposition (IBD) is a process of applying materials to a target through the application of an ion beam. [1] Ion beam deposition setup with mass separator. An ion beam deposition apparatus typically consists of an ion source, ion optics, and the deposition target. Optionally a mass analyzer can be incorporated. [2] In the ion source ...
Ion-beam lithography offers higher resolution patterning than UV, X-ray, or electron beam lithography because these heavier particles have more momentum. This gives the ion beam a smaller wavelength than even an e-beam and therefore almost no diffraction. The momentum also reduces scattering in the target and in any residual gas.
The best overall candidate is the 35 Cl ion beam; although, 79 Br would give better sensitivity by one order of magnitude compared to the 35 Cl ion beam. The mass resolution, of the detector at θ= 0°, of thin samples is ΔM/Δx ~ 0.3 amu/1000 Angstroms of the profile width. With thick samples, the mass resolution is feasible at θ≤30°.
This temperature-dependence is a manifestation of incident ion beams effectively imparting the target species-dependent activation energy to the barrier layer. [3] Ballistic ion beam mixing can be classified into two basic subtypes, recoil mixing and cascade mixing, which take place simultaneously as a result of ion bombardment.
When a beam of high energy ions is used instead of atoms (as in secondary ion mass spectrometry), the method is known as liquid secondary ion mass spectrometry (LSIMS). [ 5 ] [ 6 ] [ 7 ] In FAB and LSIMS, the material to be analyzed is mixed with a non-volatile chemical protection environment, called a matrix , and is bombarded under vacuum ...