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Water vapor can be the source of oxygen for the generation of oxides as well as a humidifier for dry gases in sputtering, spin-on and ALD processes. In the semiconductor and MEMS industries, Rapid Thermal Processing (RTP) and Diffusion need high flow rates of water vapor for short periods of time. The move to larger wafers and higher ...
Chemical kinetics, also known as reaction kinetics, is the branch of physical chemistry that is concerned with understanding the rates of chemical reactions. It is different from chemical thermodynamics, which deals with the direction in which a reaction occurs but in itself tells nothing about its rate.
where P 1, P 2 are the vapor pressures at temperatures T 1, T 2 respectively, ΔH vap is the enthalpy of vaporization, and R is the universal gas constant. The rate of evaporation in an open system is related to the vapor pressure found in a closed system. If a liquid is heated, when the vapor pressure reaches the ambient pressure the liquid ...
Moisture vapor transmission rate (MVTR), also water vapor transmission rate (WVTR), is a measure of the passage of water vapor through a substance. It is a measure of the permeability for vapor barriers. There are many industries where moisture control is critical.
The relative activity of a species i, denoted a i, is defined [4] [5] as: = where μ i is the (molar) chemical potential of the species i under the conditions of interest, μ o i is the (molar) chemical potential of that species under some defined set of standard conditions, R is the gas constant, T is the thermodynamic temperature and e is the exponential constant.
Water vapor concentration for this gas mixture is 0.4%. Water vapor is a greenhouse gas in the Earth's atmosphere, responsible for 70% of the known absorption of incoming sunlight, particularly in the infrared region, and about 60% of the atmospheric absorption of thermal radiation by the Earth known as the greenhouse effect. [25]
Water vapor has lower density than that of air and is therefore buoyant in air but has lower vapor pressure than that of air. When water vapor is used as a lifting gas by a thermal airship the water vapor is heated to form steam so that its vapor pressure is greater than the surrounding air pressure in order to maintain the shape of a ...
Iron rusting has a low reaction rate. This process is slow. Wood combustion has a high reaction rate. This process is fast. The reaction rate or rate of reaction is the speed at which a chemical reaction takes place, defined as proportional to the increase in the concentration of a product per unit time and to the decrease in the concentration of a reactant per unit time. [1]