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  2. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    MEMS microcantilever resonating inside a scanning electron microscope Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems". MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts.

  3. Microelectromechanical system oscillator - Wikipedia

    en.wikipedia.org/wiki/Microelectromechanical...

    MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.

  4. Microtechnology - Wikipedia

    en.wikipedia.org/wiki/Microtechnology

    The term MEMS, for Micro Electro Mechanical Systems, was coined in the 1980s to describe new, sophisticated mechanical systems on a chip, such as micro electric motors, resonators, gears, and so on. Today, the term MEMS in practice is used to refer to any microscopic device with a mechanical function, which can be fabricated in a batch process ...

  5. MEMS magnetic actuator - Wikipedia

    en.wikipedia.org/wiki/MEMS_Magnetic_Actuator

    These techniques include: bulk micro-machining, surface micro-machining, LIGA, wafer bonding, etc. MEMS scale of dimensions. A device is considered to be a MEMS device if it satisfies the following: If its feature size is between 0.1 μm and hundreds of micrometers. (below this range, it becomes a nano device and above the range, it is ...

  6. Harvey C. Nathanson - Wikipedia

    en.wikipedia.org/wiki/Harvey_C._Nathanson

    The first MEMS device.. Harvey C. Nathanson (October 22, 1936 – November 22, 2019) was an American electrical engineer who, with engineer Robert A. Wickstrom, invented the first MEMS (micro-electro-mechanical systems) device of the type now found in products ranging from iPhones to automobiles.

  7. Microelectronics and Computer Technology Corporation

    en.wikipedia.org/wiki/Microelectronics_and...

    TeraVicta Technologies, Austin's first MEMS company; its focus was to develop microscopic switch technology for fiber optic switching and radiofrequency switching in mobile phones specifically to dynamically switch between the future 3G-4GLTE-future5G wireless communication frequencies and ensure mobile phones were communicating over the ...

  8. Microfabrication - Wikipedia

    en.wikipedia.org/wiki/Microfabrication

    Microforming is a microfabrication process of microsystem or microelectromechanical system (MEMS) "parts or structures with at least two dimensions in the submillimeter range." [ 3 ] [ 4 ] [ 5 ] It includes techniques such as microextrusion , [ 4 ] microstamping , [ 6 ] and microcutting. [ 7 ]

  9. List of MEMS foundries - Wikipedia

    en.wikipedia.org/wiki/List_of_MEMS_foundries

    MEMS design & process development, Fraunhofer focus location for specialized MEMS-processes Silicon, SOI. Proof-of-concept, Prototyping, small volume production 8 Research Institute Germany: Hanking Electronics Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services.

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