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The stepper was itself replaced by the step-and-scan systems (scanners) which offered an additional order of magnitude resolution advance. Step-and-scan systems work by scanning only a small portion of the mask for an individual IC, and thus require much longer operation times than the original steppers.
Canon U.S.A. Commences Sale of New FPA-3030i5+ Stepper for High-Volume Production of LED, MEMS and O Business Wirevia The Motley Fool Updated July 14, 2016 at 9:44 PM
The driver ADP3418 chip (bottom left), used for driving high-power field transistors in voltage converters. Above it is seen next to such a transistor (06N03LA), probably driven by that driver. In electronics , a driver is a circuit or component used to control another circuit or component, such as a high-power transistor , liquid crystal ...
In scan-design, registers (flip-flops or latches) in the design are connected in one or more scan chains, which are used to gain access to internal nodes of the chip. Test patterns are shifted in via the scan chain(s), functional clock signals are pulsed to test the circuit during the "capture cycle(s)", and the results are then shifted out to ...
Canon introduced this system in 1987 along with the EF lens mount standard. The last non-EOS based SLR camera produced by Canon, the Canon T90 of 1986, is widely regarded as the template for the EOS line of camera bodies, although the T90 employed the older FD lens-mount standard. For a detailed list of EOS Film and digital SLR cameras, see ...
Image and Scanner Interface Specification (ISIS) is an industry standard interface for image scanning technologies, developed by Pixel Translations in 1990 (which became EMC Corporation's Captiva Software and later acquired by OpenText). [1] ISIS is an open standard for scanner control and a complete image-processing framework.
The difference between steppers and scanners is that, during exposure, a scanner moves the photomask and the wafer simultaneously, while a stepper only moves the wafer. Contact, proximity and projection Mask aligners preceded steppers [39] [40] and do not move the photomask nor the wafer during exposure and use masks that cover the entire wafer.
stepper – a step-and-scan system used in photolithography; substrate – the semiconductor material underlying the circuitry of an IC, usually silicon; system in package (SiP) – a number of integrated circuits (chips or chiplets) enclosed in a single package that functions as a complete system