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A FIB workstation. Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).
Only SEM-like imaging using secondary electrons is possible, and even that imaging is restricted to short observations due to sample damaging by the Ga + beam. The use of a dual beam instrument, that combines a FIB and an SEM in one, circumvents this limitation. The advantages of IBID are: Much higher deposition rate; Higher purity
The E-T secondary electron detector can be used in the SEM's back-scattered electron mode by either turning off the Faraday cage or by applying a negative voltage to the Faraday cage. However, better back-scattered electron images come from dedicated BSE detectors rather than from using the E–T detector as a BSE detector.
Carl Zeiss Crossbeam 550 – combines a field emission scanning electron microscope (FE-SEM) with a focused ion beam (FIB). Nanofluidics channels fabricated with a Zeiss Crossbeam 550 L, in a silicon master stamp. Ion beams can be used for material modification (e.g. by sputtering or ion beam etching) and for ion beam analysis.
In 2013, TESCAN ORSAY HOLDING was established following the merger of the Czech company TESCAN, a leading global developer and supplier of scanning electron microscopes (SEMs) and focused ion beam (FIB) workstations, and the French company ORSAY PHYSICS, a world leader in customized Focused Ion Beam and Electron Beam technology. [5]
An electron microscope uses a controlled beam of electrons to illuminate a specimen and produce a magnified image. Two common types are the scanning electron microscope (SEM) and the transmission electron microscope (TEM).
A scanning transmission electron microscope (STEM) is a type of transmission electron microscope (TEM). Pronunciation is [stɛm] or [ɛsti:i:ɛm]. As with a conventional transmission electron microscope (CTEM), images are formed by electrons passing through a sufficiently thin specimen. However, unlike CTEM, in STEM the electron beam is focused ...
Electron backscatter diffraction (EBSD) is a scanning electron microscopy (SEM) technique used to study the crystallographic structure of materials. EBSD is carried out in a scanning electron microscope equipped with an EBSD detector comprising at least a phosphorescent screen, a compact lens and a low-light camera. In the microscope an ...