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An account of the early history of scanning electron microscopy has been presented by McMullan. [2] [3] Although Max Knoll produced a photo with a 50 mm object-field-width showing channeling contrast by the use of an electron beam scanner, [4] it was Manfred von Ardenne who in 1937 invented [5] a microscope with high resolution by scanning a very small raster with a demagnified and finely ...
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Canon began SED research in 1986. [5] Their early research used PdO electrodes without the carbon films on top, but controlling the slit width proved difficult. At the time there were a number of flat-screen technologies in early development, and the only one close to commercialization was the plasma display panel (PDP), which had numerous disadvantages – manufacturing cost and energy use ...
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The signal thus picked up by the anode is further amplified and processed to modulate a display screen and form an image as in SEM. Notably, in this design and the associated gaseous electron amplification, the product p·d is an independent parameter, so that there is a wide range of values of pressure and electrode geometry which can be ...
The first STEM was built in 1938 by Baron Manfred von Ardenne, [2] [3] working in Berlin for Siemens.However, at the time the results were inferior to those of transmission electron microscopy, and von Ardenne only spent two years working on the problem.
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High energies of incident particles (200 keV electrons vs. 2 eV photons) result in much higher spatial resolution of SCEM as compared to SCOM (lateral resolution <1 nm vs. >400 nm). As compared to conventional electron microscopy ( TEM , STEM , SEM ), SCEM offers 3-dimensional imaging. 3D imaging in SCEM was expected from the confocal geometry ...