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Furnace anneals are performed by equipment especially built to heat semiconductor wafers. Furnaces are capable of processing many wafers at a time, but each process can last between several hours and a day. Increasingly, furnace anneals are being supplanted by Rapid Thermal Anneal (RTA) or Rapid Thermal Processing (RTP). This is due to the ...
Vacuum furnaces capable of temperatures above 1200 °C are used in various industry sectors such as electronics, medical, crystal growth, energy and artificial gems. The processing of high temperature materials, both of metals and nonmetals, in a vacuum environment allows annealing , brazing , purification , sintering and other processes to ...
Batch Ovens can be used for a wide variety of heat processes including drying, curing, aging, annealing, stress relieving, bonding, tempering, preheating, and forming. Batch ovens are essentially heated boxes with insulated doors that process products one at a time or in groups.
For high volume process annealing, gas fired conveyor furnaces are often used. For large workpieces or high quantity parts, car-bottom furnaces are used so workers can easily move the parts in and out. Once the annealing process is successfully completed, workpieces are sometimes left in the oven so the parts cool in a controllable way.
Annealing is most often used to soften a metal for cold working, to improve machinability, or to enhance properties like electrical conductivity. In ferrous alloys, annealing is usually accomplished by heating the metal beyond the upper critical temperature and then cooling very slowly, resulting in the formation of pearlite. In both pure ...
Rapid thermal anneal (RTA) in rapid thermal processing is a process used in semiconductor device fabrication which involves heating a single wafer at a time in order to affect its electrical properties. Unique heat treatments are designed for different effects.
In the pickling department, the plates were immersed in baths of acid (to remove scale, i.e., oxide), then in water (washing them). After inspection they were placed in an annealing furnace, where they were heated for 10–14 hours. This was known as 'black pickling' and 'black annealing'.
An oven used for annealing is called a lehr. [6] Because most glass plants melted their ingredients in a pot during the 1880s, a plant's number of pots was often used to describe capacity. [7] A major expense for glass factories is fuel for the furnace. [8] Wood and coal had long been used as fuel for glassmaking.
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