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Simple example of a process control chart, tracking the etch (removal) rate of Silicon in an ICP Plasma Etcher at a microelectronics waferfab. [1] Time-series data shows the mean value and ±5% bars. A more sophisticated SPC chart may include "control limit" & "spec limit" % lines to indicate whether/what action should be taken.
Control charts are graphical plots used in production control to determine whether quality and manufacturing processes are being controlled under stable conditions. (ISO 7870-1) [1] The hourly status is arranged on the graph, and the occurrence of abnormalities is judged based on the presence of data that differs from the conventional trend or deviates from the control limit line.
These limits reflect what the process will deliver without fundamental changes. [3]: 43 Points outside of these control limits are signals indicating that the process is not operating as consistently as possible; that some assignable cause has resulted in a change in the process. Similarly, runs of points on one side of the average line should ...
Decision tables are a concise visual representation for specifying which actions to perform depending on given conditions. Decision table is the term used for a Control table or State-transition table in the field of Business process modeling; they are usually formatted as the transpose of the way they are formatted in Software engineering.
Nelson rules are a method in process control of determining whether some measured variable is out of control (unpredictable versus consistent). Rules for detecting "out-of-control" or non-random conditions were first postulated by Walter A. Shewhart [1] in the 1920s.
The Western Electric rules are decision rules in statistical process control for detecting out-of-control or non-random conditions on control charts. [1] Locations of the observations relative to the control chart control limits (typically at ±3 standard deviations) and centerline indicate whether the process in question should be investigated for assignable causes.
Example of a "performance seeking" control-flow diagram. [1] A control-flow diagram (CFD) is a diagram to describe the control flow of a business process, process or review. Control-flow diagrams were developed in the 1950s, and are widely used in multiple engineering disciplines.
A PWI of 99% indicates that the profile runs at the edge of the process window. [6] For example, if the process mean is set at 200 °C, with the process window calibrated at 180 °C and 220 °C respectively; then a measured value of 188 °C translates to a process window index of −60%. A lower PWI value indicates a more robust profile.