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Silicon pressure sensors e.g., car tire pressure sensors, and disposable blood pressure sensors. Displays e.g., the digital micromirror device (DMD) chip in a projector based on DLP technology, which has a surface with several hundred thousand micromirrors or single micro-scanning-mirrors also called microscanners. The MEMS mirrors can also be ...
In a pressure sensor, a thin membrane transfers the force to the elements, while in accelerometers an attached seismic mass applies the forces. Sensors often tend to be sensitive to more than one physical quantity. Pressure sensors show false signal when they are exposed to vibrations.
The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]
Pressure sensors can alternatively be called pressure transducers, pressure transmitters, pressure senders, pressure indicators, piezometers and manometers, among other names. Pressure is an expression of the force required to stop a fluid from expanding, and is usually stated in terms of force per unit area.
Surface acoustic wave sensors are a class of microelectromechanical systems (MEMS) which rely on the modulation of surface acoustic waves to sense a physical phenomenon. The sensor transduces an input electrical signal into a mechanical wave which, unlike an electrical signal, can be easily influenced by physical phenomena.
NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.
RF MEMS switched capacitors are capacitive fixed-fixed beam switches with a low capacitance ratio. RF MEMS varactors are capacitive fixed-fixed beam switches which are biased below pull-in voltage. Other examples of RF MEMS switches are ohmic cantilever switches, and capacitive single pole N throw (SPNT) switches based on the axial gap wobble ...
MEMS hydrogen sensor – The combination of nanotechnology and microelectromechanical systems (MEMS) technology allows the production of a hydrogen microsensor that functions properly at room temperature. One type of MEMS-based hydrogen sensor is coated with a film consisting of nanostructured indium oxide (In 2 O 3) and tin oxide (SnO 2). [7]