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An account of the early history of scanning electron microscopy has been presented by McMullan. [2] [3] Although Max Knoll produced a photo with a 50 mm object-field-width showing channeling contrast by the use of an electron beam scanner, [4] it was Manfred von Ardenne who in 1937 invented [5] a microscope with high resolution by scanning a very small raster with a demagnified and finely ...
Electron channelling contrast imaging (ECCI) is a scanning electron microscope (SEM) diffraction technique used in the study of defects in materials. These can be dislocations or stacking faults that are close to the surface of the sample, low angle grain boundaries or atomic steps.
High-resolution transmission electron microscopy is an imaging mode of specialized transmission electron microscopes that allows for direct imaging of the atomic structure of samples. [ 1 ] [ 2 ] It is a powerful tool to study properties of materials on the atomic scale, such as semiconductors, metals, nanoparticles and sp 2 -bonded carbon (e.g ...
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As the electron optic resolution improved, it became apparent that there also needed to be improvements to the mechanical stability of the microscopes to keep pace. Many aberration corrected microscopes heavily employ sound and temperature insulation, usually in an enclosure surrounding the microscope.
Reproduction of an early electron microscope constructed by Ernst Ruska in the 1930s. Many developments laid the groundwork of the electron optics used in microscopes. [2] One significant step was the work of Hertz in 1883 [3] who made a cathode-ray tube with electrostatic and magnetic deflection, demonstrating manipulation of the direction of an electron beam.
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High energies of incident particles (200 keV electrons vs. 2 eV photons) result in much higher spatial resolution of SCEM as compared to SCOM (lateral resolution <1 nm vs. >400 nm). As compared to conventional electron microscopy ( TEM , STEM , SEM ), SCEM offers 3-dimensional imaging. 3D imaging in SCEM was expected from the confocal geometry ...